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MEMSnet Home: MEMS-Talk: su8 fabrication problem
su8 fabrication problem
2007-04-26
li chunyu
2007-04-27
Gareth Jenkins
2007-04-27
Gwennou Coupier
su8 fabrication problem
Gareth Jenkins
2007-04-27
At what point do the wrinkles occur? Possible causes are uneven hotplate
temperature or too rapid ramping / cooling.
Pitting can be due to insufficient dehydration of the wafer prior to
spinning, contaminants (either on the wafer surface or within the SU-8)
or bubbles during dispensing onto the wafer.
As for the cracks, often these are too shallow to be a problem but are
usually caused during the post exposure bake. Use a lower temperature
bake and/or ensure rapid heating and cooling is avoided. Alternatively,
I have also heard that a hard bake step sometimes closes these cracks.


li chunyu wrote:
> Recently I fabicated su8 mold and encountered some problem.
> First,after soft bake,there are some  wrinkles on the rim of dish and
> some
> pit on the surface,especially when using su8 75.
> Second,after development, there are some crackles on the surface of su8
> molding
>
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