ask for reference on gold-gold thermal compress
waferbonding
Roger Shile
2007-04-27
The most helpful paper I've found on this subject is DESIGN AND
FABRICATION OF A THZ NANOKLYSTRON by Harish M. Manohara and coworkers
from JPL. I don't know where it was published, but you can find it with
Google. Martin Schmidt from MIT has also published several papers on
wafer-level Gold Thermocompression Bonding
I have the book that you mentioned. I must warn you that it deals
almost exclusively with fusion or direct bonding and contains nothing on
Gold Thermocompression Bonding.
Roger Shile
-----Original Message-----
Hi,All,
Would someone give some useful references on gold-gold thermal
compress wafer bonding?
I'd like to bonding wafers by this mean. There is a book named
"semiconductor wafer bonding: science and technology". I'm buying it,
but it will takes months for us to get the book.
So any electronic version paper on the subject?
Thanks!
Hu Xiaodong
[email protected]
Hebei Semiconductor Research Institute