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MEMSnet Home: MEMS-Talk: Adhesion Layer for Ag and Al
Adhesion Layer for Ag and Al
2007-04-30
Xinhua Zang
2007-04-30
Jesse D Fowler
2007-05-01
Rashid, Mamun
Adhesion Layer for Ag and Al
Xinhua Zang
2007-04-30
Hi All,

Recently I evaporated Al and Ag onto a silicon substrate with thermal oxide.
I did not use any adhesion layer. Al layer seems to be ok, but Ag layer is
peeling off. Could some body suggest an adhesion layer for Ag like Cr or Ti.


Thanks,
Xinhua
reply
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