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MEMSnet Home: MEMS-Talk: Exceeding 200mJ exposure for SU-8 2150 resist
Exceeding 200mJ exposure for SU-8 2150 resist
2007-05-03
Yue Mun Pun, Jeffrey
2007-05-04
Ren Yang
Bernoulli chuck
2007-05-06
Andrea Mazzolari
Exceeding 200mJ exposure for SU-8 2150 resist
Yue Mun Pun, Jeffrey
2007-05-03
Hi,
I have heard on this forum that somebody mentioned that in exposing SU-8 we
should not exceed 200mJ at a time.  I will be exposing SU-8 2150 at 260mJ,
should I do it in 2 steps?

Jeffrey
reply
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