The laser made transparencies used for making PCB's can get pretty good
results down to 25u line spaces or 25u Dia holes. You can go down lower but
the edge quality is bad. Even better results can be used once the
transparencies are process with extra care - longer bake, standing times
etc, but most houses won't do it.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jesse D Fowler
Sent: Friday, May 11, 2007 4:07 AM
To: J.J wang; General MEMS discussion
Subject: Re: [mems-talk] Photolithography Transparency Vendor

Every transparency I've ever tried, including ones that claimed high
resolution, could not hit 10 um. The best I could consistently get was 40
um.

So, if anyone has experience with better quality, please let me know, too.

Jesse Fowler