I am trying to make SU-8 to SU-8 bonding.
This is my procedures.
1.Spin coat of SU-10 on pyrex glass around 10um.
2.prebake 2min for 65 and 5min for 95 on hotplate.
3.exposure 15 sec with 365nm line and postbake 1min for 65 and 2min for
95
4.develope
5.Spin coat of SU-5 on another pyrex glass around 3um.
6.bake 1min for 65 and 3min for 95 on hotplate.
7.place them together using wafer bonder at 95 with 500N force for 10
min.

The bonding look strong but I do not see any patterns. I guess there is
some resist reflow duing bonding process.
Could you guys please take a look my procedures? Please give me some
advices.
Thanks.