Hi,

In my experience I never could remove SU-8 from the wafers after it was UV
exposed and cross-linked.
You may have to try Omni coat - look it up on Microchem website - and with it
you will be able to remove SU-8.

Sincerely,
Anna

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Simon Zhang/gcemarket
Sent: Monday, May 14, 2007 12:06 PM
To: [email protected]
Subject: [mems-talk] How to etch SU8 from Nickel structure?


Anyone knows good wet or dry etching method for etching SU8 from Nickel
structure ?

Thanks and regards,

Simon Zhang
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