Streemanth,
Vacuum dehydrate and vapor HMDS deposit in vacuum vapor
prime. It holds up to more than a 30 minute etch in BHF. If moisture
enters the equation the resist lifts in minutes.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA 94551-5152
(925) 373-8353
[email protected]
www.yieldengineering.com