A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: wet etching of glass
Off-the-shelf product with known C-V
2007-05-18
Andrew O'Grady
wet etching of glass
2007-05-18
Mohamad Hajj Hassan
2007-05-18
shay kaplan
2007-05-21
David Nemeth
2007-05-23
Koray Karakaya
wet etching of glass
shay kaplan
2007-05-18
Mohamed,
If your mask is Si, use concentrated HF it is the fastest way. The etch will
be isotropic at best, unless you have very good adhesion between the Si and
the glass, the lateral etch rate will be higher than the vertical one,
especially at the interface. if you need better aspect ratio, try ultrasonic
drilling or abrasive blasting.
Good luck
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Mohamad Hajj Hassan
Sent: Friday, May 18, 2007 7:53 PM
To: General MEMS discussion
Subject: [mems-talk] wet etching of glass

Hello Everyone,

Could anyone provide me with a recipe for wet etching of glass to a depth of
500um? The masking layer is silicon, on which, a multilayer of metal Cr/Au
is
deposited.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
MEMS Technology Review