Hi Andrew,
What kind of odd results are you talking about? And may be more importantly,
what you were expecting to see? I'm asking because you might be observing
polarization switch during voltage sweep if you are using a ferroelectric
material, as in the case of perovskite piezoelectrics for instance.

Koray Karakaya


-----Original Message-----
> From: [email protected] [mailto:[email protected]]
> On Behalf Of Andrew O'Grady
> Sent: Friday, May 18, 2007 11:32 AM
> To: [email protected]
> Subject: [mems-talk] Off-the-shelf product with known C-V
>
> Hello Everyone,
>
> I am using the Keithley 590CV for capacitance-voltage measurements on my
> MEMS sensor which actuates when a voltage is applied. I have been getting
> some odd results, and the Keithley 590CV has not been calibrated in a long
> time and may not be working properly. Does anyone know of a product that I
> could purchase and test with a known C-V curve? Perhaps an accelerometer?
> I
> would prefer that i could use it on a probe station, and the capacitance
> change should be at least 10fF.