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MEMSnet Home: MEMS-Talk: XeF2 etch on W
XeF2 etch on W
2007-05-24
kris
2007-05-24
Bill Flounders
2007-05-24
Kirt Williams
XeF2 etch on W
kris
2007-05-24
Hello,

I am using XACTIX to etch Si. I have Tungsten layer on
silicon. I was wondering if XeF2 etches Tungsten.

Thanks,
Kris

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