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MEMSnet Home: MEMS-Talk: thin polyimide sensitive to i-line
thin polyimide sensitive to i-line
2007-05-28
Ebin Liao
thin polyimide sensitive to i-line
Ebin Liao
2007-05-28
Dear MEMS fellows,

I'm searching spin-coatable (1~2um) polyimide that is sensitive to i-line
lithography. Since polyimide usuallly can't be coated for thickness in this
range, thinner may have to used together. Anyone has ideas on where I can get
this product? I've tried HD Microsystems but didn't get positive feedback. Thank
you very much.

Rgds,
Ebin
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