MEMS-talk

News	MEMSnet Home: MEMS-Talk: E-beam evaporation of Chrome on uncrosslinked SU-8 E-beam evaporation of Chrome on uncrosslinked SU-8 2007-05-29 Yue Mun Pun, Jeffrey 2007-05-29 shay kaplan amount of swelling 2007-05-30 Rajib Ahmed 2007-05-30 Matthew Coda Diamond 2007-05-31 Andrea Mazzolari 2007-05-31 shay kaplan 2007-05-31 Andrea Mazzolari 2007-06-01 Rick Williston E-beam evaporation of Chrome on uncrosslinked SU-8 Yue Mun Pun, Jeffrey 2007-05-29 Hi, I would like to evaporate chromium on uncrosslinked SU-8. Can anyone tell me if this is possible even if a low rate of evaporation is used? Thanks. Jeffrey reply
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