E-beam evaporation of Chrome on uncrosslinked SU-8
shay kaplan
2007-05-29
Jeff,
I think the illumination from the source (boiling chrome is ~2700deg C) will
expose the SU8.
Shay
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Yue Mun Pun, Jeffrey
Sent: Tuesday, May 29, 2007 11:10 AM
To: [email protected]
Subject: [mems-talk] E-beam evaporation of Chrome on uncrosslinked SU-8
Hi,
I would like to evaporate chromium on uncrosslinked SU-8. Can anyone tell
me if this is possible even if a low rate of evaporation is used? Thanks.