>From what I've seen, the mirror doesn't rotate until enough voltage is
applied to overcome the rotational force, then it rotates until compliance.
So the relationship is discrete not linear.

Robert

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of matthew king
Sent: Saturday, June 02, 2007 10:39 AM
To: [email protected]
Subject: [mems-talk] linearization of voltage-angle relationship in
atorsional micromirror

Hi,

Is there any method to linearize the relationship
between the voltage and rotation angle in a torsional
micromirror? 3 degree rotation angle at most is OK.