Ashwini:

We have used Fomblin synthetic oil in the past for these applications. Clean up
afterwards is as easy as using Simple Green detergent followed by rinse and dry.
Bob Henderson

-----Original Message-----
From: ashwini jambhalikar 
To: [email protected]
Sent: Wed, 13 Jun 2007 9:39 pm
Subject: [mems-talk] Drie support wafer

Dear Friends,

Can anybody suggest me a better option than cool grease, for through etching
in DRIE

The wafer to be through etched needs a support wafer, and I am always using
cool grease in between the support wafer and the actual wafer to be etched.

Cool grease removal is really a headache, it can break the delicateÂ
structures.

I have heard about something like conducting tapes, which can be usedÂ
instead of cool grease.

if anybody knows about it or any other better option, please let me know...