Thank you Dr. Hewes.
As you have said, PDMS is a reticulated hydrophobic elastomer and
probably will not be attacked by acids or bases in water anyway. The
problem, in my opinion, is find any of such solutions able to remove
the evaporated Oxide Film without attack the glass (an oxide too).
Even so, I have sputtered a substrate with SiO2 and I will try.
Thank you very much again
[8^)
NH
>From: "Philip D. Hewes"
>To: [email protected]
>Date: Sat, 23 Jun 2007 13:17:47 -0400
>Subject: [mems-talk] RE: PDMS Sealing over Au?!
>Perhaps a good methodology would build on what Joe describes--the
>deposition of an oxide layer onto an Au substrate, and after bonding,
>removal of the unbonded oxide in the microfluid channels, perhaps
>through use of an acid to ionize the oxide. There is a good paper by
>the Whitesides lab (discussed recently on this forum) on solubility of
>PDMS with acids/bases; I can't remember what the paper said about
>acid/base solubility. It's probably very low due to PDMS's
>hydrophobicity.
>
>Best,
>Philip H.