Steve,

Do you use O2 plasma ashing process? Is this a short process? Can you give a
little bit more details? Btw, how do you know the polymers were removed?
Thanks!

Gene

On 6/25/07, [email protected]  wrote:
>
> Gene:
>
> Tepla has had good success in removing some sidewall polymers produced by
> the Bosch process using Microwave Plasma.