David,

Thank you for replying. My features are from 10 um to 30 um wide and they are
oriented at different angles which eliminates the use of anisotropic etches.

Dan Chilcott


 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of David Nemeth
Sent:   Wednesday, June 27, 2007 3:09 PM
To:     'General MEMS discussion'
Subject:        RE: [mems-talk] Isotropic silicon etch

How wide are your features?