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MEMSnet Home: MEMS-Talk: (211) silicon etch rate
Etch Glass/Quartz substrate
2007-07-02
Haixin Zhu
(211) silicon etch rate
2007-07-02
Andrea Mazzolari
(211) silicon etch rate
Andrea Mazzolari
2007-07-02
Hi all,
could someone suggest a reference with data about etch rate in KOH of
silicon (211)? I'm interested to etch rate as function of temperature and
KOH concentration.

Best regards,
Andrea

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