I have hard time in depositing platinum.

  I tried three different size e-beam evaporator but all deposition result in my
PMMA resist damage.

  If resist continues damage, I should go with negative resist for EBL and need
to etch out the other area but I'm afraid whether I could get good resolution
(~10nm) with etching.

  How did you resolve the heat problem? I tried to reduce the evaporation rate
but it seems not very helpful.

  Thank you,

  Sokwon Paik
  Postdoctoral research associate
  Oak Ridge National Laboratory