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MEMSnet Home: MEMS-Talk: About Si etching in TMAH
About Si etching in TMAH
2007-07-04
abhaya joshi
About Si etching in TMAH
abhaya joshi
2007-07-04
hi all

i am working on Si etching using TMAH.
I am using Si added TMAH (10wt%) with AP for Al protection. As desired, I
have found that protective layer is formed over AL pads.
I am facing the problem in removing this layer to get good electrical
contact.
Does any one have any clue for this situation.
-abhay joshi
University of Pune
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