MEMS-talk

News	MEMSnet Home: MEMS-Talk: polymer fabrication polymer fabrication 2007-07-06 hammouche khales 2007-07-06 emelianov 2007-07-09 Rashid, Mamun anodic bonding and passivation layer thickness 2007-07-09 H.J. van der Linden How to get a sheet of Cr film via E-beam evap. 2007-07-09 hung bost 2007-07-10 Shay Kaplan 2007-07-10 Anil Agiral 2007-07-10 Peter Svasek redeposition of SiO2 2007-07-11 cal Bear plasma etching of SiO2 and its selectivity over resists 2007-07-12 prabhu arumugam plasma etching of SiO2 and its selectivity over resists 2007-07-12 Kirt Williams Polystyrene bonding problem 2007-07-13 Rashid, Mamun 2007-07-13 Joseph Grogan 2007-07-13 Rashid, Mamun polymer fabrication Rashid, Mamun 2007-07-09 Hello, For the micro fabricated bio chip/ micro fluidic devices Class 1000/100 required, although it is dependent on the fabrication protocol and materials as well as dimension. Usually polymer based micro fluidic devices demand class 1000/100 for the fabrication. For the cleaning you can use Decon 90 and followed by IPA in the ultrasonic bath. It will remove micro/nano monomer. Regards, Mamun Rashid PhD Candidate Centre for Nano & Microsystems University of Teesside TS1 3BA. U.K www.mamun.info -----Original Message----- From: [email protected] [mailto:[email protected]] On Behalf Of hammouche khales Sent: 06 July 2007 02:59 To: [email protected] Subject: [mems-talk] polymer fabrication Hellos all, I have some questions if there is one ho need to help me! - i need to have some informations for polymer fabrciation (especially using PDMS ), and if there is contaminations problems with CMOS process? - what the clean room class if we need to fabricate bio-chip (or microfluidic devices)? reply
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