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MEMSnet Home: MEMS-Talk: How to get a sheet of Cr film via E-beam evap.
polymer fabrication
2007-07-06
hammouche khales
2007-07-06
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2007-07-09
Rashid, Mamun
anodic bonding and passivation layer thickness
2007-07-09
H.J. van der Linden
How to get a sheet of Cr film via E-beam evap.
2007-07-09
hung bost
2007-07-10
Shay Kaplan
2007-07-10
Anil Agiral
2007-07-10
Peter Svasek
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Joseph Grogan
2007-07-13
Rashid, Mamun
How to get a sheet of Cr film via E-beam evap.
hung bost
2007-07-09
Hello thinfilm experts,

  I need to get a thin sheet of Cr so I can study its structure, but I can't
seem to figure out a recipe to do so. Whenever I put an evaporated sample into
acetone or any resist remover to do the lift off, I can see sheets of metal of
different sizes flowing around. However, with E-beam evaporated Cr , 1000 to
3000 A thick, the metal discopose into acetone as if I were using ultrasound
bath. it appears as if there is no bonding between the grains of the Cr and thus
it can't form sheet of metal. What puzzling me is that Cr is mainly being used
as adhesion promoter, but why its grains don't seem to stick to each other? Can
someone shed a light on this darkness of mine?


  Many thanks

  Hung

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