A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: anodic bonding and passivation layer thickness
anodic bonding and passivation layer thickness
2007-07-10
Roger Shile
anodic bonding and passivation layer thickness
Roger Shile
2007-07-10
That linky no worky.  If you give the title of the paper and the journal
perhaps we can find it.

Roger Shile

-----Original Message-----


Hi Heiko,

Did you try Spin on Glass :

http://ej.iop.org/links/rFX7FtpBR/7PdGtMMu3BGc8eyQav5vpA/jm7307.pdf

Anil Agiral
PhD student
MESA+ Institute for Nanotechnology,
University of Twente, The Netherlands


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
MEMS Technology Review