MEMS-talk

News	MEMSnet Home: MEMS-Talk: plasma etching of SiO2 and its selectivity over resists polymer fabrication 2007-07-06 hammouche khales 2007-07-06 emelianov 2007-07-09 Rashid, Mamun anodic bonding and passivation layer thickness 2007-07-09 H.J. van der Linden How to get a sheet of Cr film via E-beam evap. 2007-07-09 hung bost 2007-07-10 Shay Kaplan 2007-07-10 Anil Agiral 2007-07-10 Peter Svasek redeposition of SiO2 2007-07-11 cal Bear plasma etching of SiO2 and its selectivity over resists 2007-07-12 prabhu arumugam plasma etching of SiO2 and its selectivity over resists 2007-07-12 Kirt Williams Polystyrene bonding problem 2007-07-13 Rashid, Mamun 2007-07-13 Joseph Grogan 2007-07-13 Rashid, Mamun plasma etching of SiO2 and its selectivity over resists prabhu arumugam 2007-07-12 Hello all, Could you please tell me some good references for plasma etching of SiO2 and its selectivity over resists. Thanks Prabhu Prabhu Arumugam Postdoctoral Researcher NASA Ames Research Center Bldg 229, Room 126 Mail Stop 229-1 Moffett Field, CA 94035 reply
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