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MEMSnet Home: MEMS-Talk: Polystyrene bonding problem
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plasma etching of SiO2 and its selectivity over resists
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Polystyrene bonding problem
2007-07-13
Rashid, Mamun
2007-07-13
Joseph Grogan
2007-07-13
Rashid, Mamun
Polystyrene bonding problem
Rashid, Mamun
2007-07-13
Hi Joe,
Thank you for your advice. I have think about the solvent bonding and
currently working on it. But still now have not achieved any good
result.
Can you please advice me any protocol for the solvent bonding please ?
Any help will be appreciated.
Regards,

Mamun Rashid
PhD Student
Centre for Nano & Microsystems
University of Teesside
TS1 3BA. U.K
www.mamun.info
+44(0)164 234 2428

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Joseph Grogan
Sent: 13 July 2007 16:03
To: General MEMS discussion
Subject: Re: [mems-talk] Polystyrene bonding problem

I don't have much personal experience with it, but maybe try solvent
bonding. You coat one (or both) sides to be mated with some solvent to
melt it a bit and get it tacky, then mate, and it bonds. The trick is to
find the right solvent and use an amount and concentration that doesn't
distort your features.
reply
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