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MEMSnet Home: MEMS-Talk: etchant for SiO2 without etching alumina
etchant for SiO2 without etching alumina
1998-02-11
Yagang Li
etchant for SiO2 without etching alumina
Yagang Li
1998-02-11
Dear colleagues,

My friend gived me this email address because he thought it might
be a forum site for discussing etching-related issues. Anyway,
I like to have a goahead.

My problem is to find an etchant for SiO2 which does not substantially
etch alumina Al2O3. Is somebody there who happens to know the
formula of this sort of etchant. Your suggestion and help would be
much appreciated.


Cheers.


Yagang Li

Department of Materials
Oxford University

[email protected]


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