Hello,
We are looking for a remover for polyimides by HD microsystem (PI2737
and PI2610) to be used in the bowl wash process in an automated spin
coater system (for cleaning purposes of the equipment after spinning).
If this chemical also works for BCB, it would be great since we are
planning to use the module for polyimide and BCB. I appreciate any
offer for our problem.

Thanks in advance,
Best regards,


Kagan TOPALLI, Ph. D.
Senior Research Engineer
MEMS-VLSI Group
Middle East Technical University
Dept. of Electrical & Electronics Eng.
TR-06531 Ankara Turkey
Phone: +90 312 210 44 09
Fax: +90 312 210 12 61