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MEMSnet Home: MEMS-Talk: Piranha Etching of Silicon Carbide
RE: Microfluidics ports
2007-07-25
Dave
Piranha Etching of Silicon Carbide
2007-07-25
Sreemanth M Uppuluri
Piranha Etching of Silicon Carbide
Sreemanth M Uppuluri
2007-07-25
Hello All,

I am trying to etch nickel coated on silicon carbide films without affecting
the SiC. Is Piranha a good candidate for this? Please let me know.

Thanks,
Sreemanth


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