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MEMSnet Home: MEMS-Talk: lines SU-8 sidewall
lines SU-8 sidewall
2007-08-16
Chen Han Lee
2007-08-17
robust
lines SU-8 sidewall
Chen Han Lee
2007-08-16
Hi Colleagues,

I am using su-8 to build thick structures,
have anyone experience vertical lines on the walls of the su-8 structures?
what are they called and what caused them?

thanks a lot


Chen-Han Lee
Microsystems Group
University of Birmingham
B15 2TT UK

email: [email protected]
tel: +44 121 4144260
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