dry etch recipe for Prolift100 polyimide (Brewer
Science)
Jill Yang
2007-08-17
Anyone used Brewer Science's polyimide (prolift-100)? How to dry etch a
"clean" via without residue? Oxygen plasma with photoresist mask doesn't do
a good job --- lot of grass at the bottom of the via.
Thanks.
-Jill