I experienced that as I develop holes array and it may be caused by over
exposure or too long time PEB. developing with strong Agitation, such as
ultrusonic or megasonic might help if you do not like adjust your other
processes.

Regards!

Xiao Qiang

  _____

From: [email protected] on behalf of Chen Han Lee
Sent: Fri 8/17/2007 7:11 AM
To: [email protected]
Subject: [mems-talk] lines SU-8 sidewall

Hi Colleagues,

I am using su-8 to build thick structures,
have anyone experience vertical lines on the walls of the su-8 structures?
what are they called and what caused them?