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MEMSnet Home: MEMS-Talk: III-V semiconductor wet etch
Lift-off Process for High Density Metal Electrodes (5-10 microns separation)
2007-08-22
AKM Newaz
Lift-off Process for High Density Metal Electrodes(5-10 microns separation)
2007-08-22
Bill Moffat
III-V semiconductor wet etch
2007-08-22
Andrea Mazzolari
Lift-off Process for High Density Metal Electrodes(5-10 microns separation)
2007-08-22
Roger Shile
III-V semiconductor wet etch
Andrea Mazzolari
2007-08-22
Hi all,
i'm interested to III-V semiconductor wet etch, in particular to etch of
InSb.
i'm interested to both anisotropic and istropic etch.

Any suggestions on this topic ?

many thanks,
Andrea

reply
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