See http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf .
Ag was evaporated onto Si at 0.5 nm/s. A 10-nm Cr adhesion layer was used.
--Kirt Williams
----- Original Message -----
From: "Vikrant A. Chaudhari :)"
To:
Sent: Monday, August 20, 2007 9:33 AM
Subject: [mems-talk] Ag deposition on Si
> hello friends,
>
> has any one tried Ag deposition on Si
>
> vikrant