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MEMSnet Home: MEMS-Talk: Spin coating AZ9260 on polymerised SU-8
Spin coating AZ9260 on polymerised SU-8
2007-08-28
Yue Mun Pun, Jeffrey
2007-08-28
Peter Svasek
Spin coating AZ9260 on polymerised SU-8
Yue Mun Pun, Jeffrey
2007-08-28
Hi,
I am trying to coat AZ9260 on polymerised SU-8 2005 in order to pattern gold
conductors on the SU-8.  Has anyone had any experience on this before?  It seems
that the AZ9260 keeps spinning off the SU-8 when I use 2100rpm for 60s.

Jeffrey
reply
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