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MEMSnet Home: MEMS-Talk: Spin coating AZ9260 on polymerised SU-8
Spin coating AZ9260 on polymerised SU-8
2007-08-28
Yue Mun Pun, Jeffrey
2007-08-28
Peter Svasek
Spin coating AZ9260 on polymerised SU-8
Peter Svasek
2007-08-28
Hi Jeffrey,
I had a similar Problem when I tried ro spin SU-8 onto a crosslinked and
hardbaked
layer of SU-8. It formed just single droplets on the surface of the
hardbaked SU-8.
A short (1 min) treatment with O2-Plasma fixed this problem.
Good luck

Peter Svasek
Vienna University of Technology
Institute of Sensor- and Actuator Systems
Gusshausstrasse 27-29 / 366
1040 Wien
Austria



Yue Mun Pun, Jeffrey schrieb:
> Hi,
> I am trying to coat AZ9260 on polymerised SU-8 2005 in order to pattern gold
conductors on the SU-8.  Has anyone had any experience on this before?  It seems
that the AZ9260 keeps spinning off the SU-8 when I use 2100rpm for 60s.
reply
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