Ron,
    Look up early 1960 onwards Kodak seminars.  Kodak started seminars
in the 60's for yearly technical reports.  At that time Kodak were the
only resist manufacturers in town and negative resist was the only
resist commercially available.  If you get nowhere let me know.  I
started saving my Kodak technical reports in 1983.  So I have some early
papers.  S.P.I.E. is another good source of resist technical papers.
Harry Levinson has written an excellent book but mostly on positive
resists.  Let me know if you can not get papers that will help.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

[email protected]

www.yieldengineering.com


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Ron Martin
Sent: Tuesday, August 28, 2007 12:31 PM
To: 'General MEMS discussion'
Subject: [mems-talk] Negative resist studies

Hello,

        I am looking into obtaining literature on negative resist.  I
was told that in the 70s, there was an active body of research
pertaining to negative resist studies.  I am primarily interested in
negative cross-linking events (especially the accidental,
non-intentional ones that lead to residue).  I appreciate any help.
Thanks.

Ron Martin
BEI Systron Donner
QFAB Lithography Engineer
office:  925-671-6563