Is there any particular reason that you need to use SU-8? If there isn't, this
sounds like something that could be made in a machine shop out of a wide variety
of materials. You might want to consider that first, as a 700 micron "film" will
give you lots of problems.


Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
Fax   : +31 (0)53 489 35 95
Email : [email protected]

-----Original Message-----
From: [email protected] on behalf of Xiaoguang Liu
Sent: Thu 8/30/2007 7:08 PM
To: General MEMS discussion
Subject: [mems-talk] Thick SU-8 Patterning

Dear MEMS community

I'm looking into the possibility of using SU-8 to form rectangular cavity of
about 4mmx4mm and 700-900um deep. From SU-8 datasheet, it seems that >200um
SU-8  is possible with a single spin coat. So I guess maybe multiple coating
of SU-8 could possibly approach the thickness I want.

I do not have any experience with SU-8 and I'm seeking advice from more
expeienced users.