Richard I will try to reach you directly for a series of discussions on
HMDS.  Simple answer 100% HMDS and vacuum vapor prime.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

[email protected]

www.yieldengineering.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Richard B. Keithley
Sent: Thursday, August 30, 2007 12:58 PM
To: [email protected]
Subject: [mems-talk] HMDS For Adhesion

Hey Y'all!

I want to use HDMS for adhesion of a DQ resist to my silicon substrate.
  I have looked in literature different groups use varying
concentrations of HDMS (ex:  10%, 20%, 100%).  I was wondering if anyone
had any personal experience they could share to help me out.