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MEMSnet Home: MEMS-Talk: Thick SU-8 Patterning
Thick SU-8 Patterning
2007-08-30
Xiaoguang Liu
2007-08-30
[email protected]
2007-08-30
Xiaoguang Liu
SV: [mems-talk] Thick SU-8 Patterning
2007-08-31
eowin rohan
Thick SU-8 Patterning
Xiaoguang Liu
2007-08-30
Dear Kevin

Thank you for the reply. Our major concern is the surface roughness of
the cavity. I'm actually not sure about the surface finish quality of
a machined cavity. But We are looking at sub-micron roughenss. Thanks

Best
Leo

On 8/30/07, [email protected]  wrote:
> Is there any particular reason that you need to use SU-8? If there isn't, this
sounds like something that could be made in a machine shop out of a wide variety
of materials. You might want to consider that first, as a 700 micron "film" will
give you lots of problems.
--

Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
[email protected]
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