Dear Liu,

It is very much possible to make film up to 1mm using SU-8 (500),
Process is bit odd (for many in the field of photo-lithography) but
anyways I always got success in archiving height up to 1000 micron +
or - 2 to 5 micron. If you need the whole protocol, please email me.
But is it true that prebake will take long long time... for 1 mm about
12 hours for 500 micron  about 7 hours... for 800 to 900 micron you
have calculated using amount of Su-8 needed to cover whole wafer...
and also very high dose of UV.... you have to give dose in pulses with
1 min rest time.. to avoid burning of top layer... if you are
interested then please email me...

Best

Dr. Amit Asthana
Brain-pool Scientist
Institute of Applied Chemistry and Biological Engineering
(IACBE), Polymer Derived Ceramic Material Lab,
Chungnam National University, 220 Kung-Dong, Yusung-Gu
Daejeon, 305-764, South Korea.
Phone: 042 821 8920 / 7684 (office)
Fax:     042 823 6665
Email: [email protected]
          [email protected]