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MEMSnet Home: MEMS-Talk: SU-8 dissolvable in Methanol solution?
SU-8 dissolvable in Methanol solution?
2007-09-06
Steven Yang
2007-09-07
Yue Mun Pun, Jeffrey
SU-8 dissolvable in Methanol solution?
Steven Yang
2007-09-06
Hi, all
I plan to do some SU-8 patterned microfluidic channel, and it might be
used for methanol flow. Does anybody have experience that SU-8 will be
dissolved in methanol or not?

btw, I also like to know is it possible to sputtering some metal like
Cr/Au for patterned electrode on SU-8 layer? what will be the PR for
this lift-off process?

and has anybody done the glass to SU-8 (which on Si sub) adhesion
bonding before? what will be the procedure for this?

Thanks a lot!

Best regards,
Steven
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