Dear Steve,

If it will work with your process, you might want to try the SU-8 3000 series.
The aspect ratios you can achieve with it aren't as good, but it does have
improved adhesion on ITO.

The datasheet is here:
http://www.microchem.com/products/pdf/SU-8%203000%20Data%20Sheet.pdf

Alternatively, you could use an adhesion layer. For pillars, this would work by
patterning something SU-8 adheres well to (such as Ta) on the ITO.

If you're doing SU-8 pillars on ITO, I'm guessing it's for some sort of surface
with switchable hydrophobicity. If this is the case, that Ta pad shouldn't make
much of a difference.

Finally, omnicoat might work, but I'm not sure what the chemistry would be at an
ITO surface. It's worth looking at though, at least.

- Kevin

*********************************
Kevin Paul Nichols
PhD Student
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
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Email : [email protected]

-----Original Message-----
From: [email protected] on behalf of Steve Jung
Sent: Tue 9/11/2007 8:20 AM
To: [email protected]
Subject: [mems-talk] SU-8 adhesion on ITO coated glass


Dear all,


I am planning to build SU-8 pillars for a microfluidic device
but have some questions in choosing the right product.

The SU-8 pillars (ca. 10um) are supposed to be built on
an ITO coated glass and I heard the adhesion of SU-8 on
glass substrate is very poor.


Does the adhesion property get worse on ITO coated glass
substrates than on normal glass substrates?


Also, does the adhesion property of SU-8 2000 (MCC)
differ from the original SU-8 (MCC)?

If so, could anyone tell me which product would more
be advantageous to coat on an ITO coated glass substrate?