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MEMSnet Home: MEMS-Talk: Nb wet etching
Nb wet etching
2007-09-22
Sadhana Patil
2007-09-24
Kirt Williams
2007-09-24
Edward Sebesta
2007-09-24
Roger Shile
Nb wet etching
Edward Sebesta
2007-09-24
For what it is worth, if anything.

People who make superconducting chips etch this. Perhaps one of IBMs
journals.

You might google for squids and etch.

Ed

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Sadhana Patil
Sent: Friday, September 21, 2007 8:49 PM
To: [email protected]
Subject: [mems-talk] Nb wet etching

Hi all,
Looking for some help on the kind of wet etchants available for etching
Nb.
I have vaguely heard about HF(1):HNO3(1). Does anybody have an idea of
what is the etch rate of this chemical for Nb? Are there any other
etchants available for Nb? And does it etch other metals like Au, Fe,
CuMn, Ni?
Thanks,
ES...
reply
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