Brian S Cheung wrote:
>
Try the "MEMS Clearinghouse" at
http://mems.isi.edu/mems/materials/index.html.


> My partner and I are undergraduate students who are working on a summer
> project, the design of a MEMS accelerometer, for our prof.  We would like
> to perform some CAD simulations of a silicon beam, but are lacking several
> of the values for silicon's mechanical properties.  We're not looking
> for highly detailed values, but some rough, crystal orientation
> averaged numbers that would give us reasonable results.  Can anyone
> recommend us to a good reference book, journal articles, web site, etc.
> Even better, if someone has already performed some computer simulations,
> we'd be grateful if you could share the property values used and how they
> compared to the reality.
>
> Much obliged.
>
>                *    "And then the storm breaks, and it is not thunder at
> Brian Cheung   *     all, but that entropic inner-ear whine of molecules
> U of Toronto   *     breaking apart and whirling away."
> EngSci 0T0     *                                -- Evolution's Shore
>                *                                   Ian McDonald
>
>

--
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Dr. John Neumann
Postdoctoral Researcher, ECE Dept.
2124 Hamerschlag Hall
Carnegie Mellon University
Pittsburgh, PA 15213-3890

[email protected]
phone: (412) 268-6642
FAX: (412) 268-6662