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MEMSnet Home: MEMS-Talk: conducitve DLC (ta:C)
conducitve DLC (ta:C)
2007-10-03
sebastian wicklein
conducitve DLC (ta:C)
sebastian wicklein
2007-10-03
Dear Colleagues,

I was wondering if someone of you might know a company that is able to
deposit conductive DLC (ta:C) (Nitrogen-doped) on MEMS structures.

Reason for that is, I want to combine the low thermal conductivity of DLC
(~2-3 W/mK) with a proper electrical conductivity.


Regards,

Sebastian


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