You are quite correct, I should have said low O2 to the point that you
don't get blocked etch.

Ed

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Patrick Lu
Sent: Wednesday, October 03, 2007 4:39 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Quartz etching using RIE

In the past when I've etched quartz, I've always gotten polymer build-up
with I didn't add at least a little oxygen.