Brian,

The book "Micromachine Transducers Sourcebook" by Gregory T. A. Kovacs
published by McGraw-Hill 1998 has material properties on p. 26.  To save you a
little time finding the book, for single crystal silicon, he gives the Yield
Strength = 7*10^9 N/m2, Knoop Hardness = 850 Kg/mm2, Young's Modulus = 190
GPa, Density = 2.3 g/cm3, Thermal Conductivity = 1.57 W/cm*K, Thermal
Expansion Coefficient = 2.33*10^-6/K.  He says that silicon is anisotropic to
crystal orientation, but does not give any values for different orientations.
Thus, I presume that these are crystal orientation averaged numbers.

Brian S Cheung wrote:

> My partner and I are undergraduate students who are working on a summer
> project, the design of a MEMS accelerometer, for our prof.  We would like
> to perform some CAD simulations of a silicon beam, but are lacking several
> of the values for silicon's mechanical properties.  We're not looking
> for highly detailed values, but some rough, crystal orientation
> averaged numbers that would give us reasonable results.  Can anyone
> recommend us to a good reference book, journal articles, web site, etc.
> Even better, if someone has already performed some computer simulations,
> we'd be grateful if you could share the property values used and how they
> compared to the reality.
>
> Much obliged.
>
>                *    "And then the storm breaks, and it is not thunder at
> Brian Cheung   *     all, but that entropic inner-ear whine of molecules
> U of Toronto   *     breaking apart and whirling away."
> EngSci 0T0     *                                -- Evolution's Shore
>                *                                   Ian McDonald
>



--
John R. Karpinsky  ---  Chief Physicist
MEMS Optical, Inc., 205 Import Circle, Huntsville, AL 35806
Tel: 205-859-1886  Fax: 205-859-5890  Email: [email protected]