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MEMSnet Home: MEMS-Talk: fudging/spreading around the PR features
fudging/spreading around the PR features
2007-10-05
Sadhana Patil
2007-10-05
Edward Sebesta
2007-10-06
Sadhana Patil
NC-200
2007-10-07
Andrea Mazzolari
2007-10-08
Edward Sebesta
Lithographic Tests masks for the EVG620
2007-10-12
Edward Sebesta
2007-10-05
Andrea Mazzolari
2007-10-05
dbp lists
2007-10-06
Andrea Mazzolari
2007-10-06
shay kaplan
Sapphire stiffness matrix
2007-10-07
Andrea Mazzolari
2007-10-06
[email protected]
fudging/spreading around the PR features
Sadhana Patil
2007-10-06
On 10/6/07, Sadhana Patil  wrote:
 Thank you Ed for your help.
I was suspecting my oven bake is causing the problem...because of
trapping the gases below resist...but wasn't sure. So your point #2
seems to be my answer. In this part you mentioned that there could be
too much or too less baking (hope I understant it right). So  do you
mean too less will cause threadlike structures and too much will cause
uneven resist thickness all over?
~Sadhana
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